Side-wall spacer passivated sub-μm Josephson junction fabrication process
نویسندگان
چکیده
منابع مشابه
Characterization and Reduction of Capacitive Loss Induced by Sub-Micron Josephson Junction Fabrication in Superconducting Qubits
Josephson Junction Fabrication in Superconducting Qubits A. Dunsworth, a) A. Megrant, a) C. Quintana, Zijun Chen, R. Barends, B. Burkett, B. Foxen, Yu Chen, B. Chiaro, A. Fowler, R. Graff, E. Jeffrey, J. Kelly, E. Lucero, J.Y. Mutus, M. Neeley, C. Neill, P. Roushan, D. Sank, A. Vainsencher, J. Wenner, T.C. White, and John M. Martinis 2, b) Department of Physics, University of California, Santa ...
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ژورنال
عنوان ژورنال: Superconductor Science and Technology
سال: 2017
ISSN: 0953-2048,1361-6668
DOI: 10.1088/1361-6668/aa9411